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H. Tanaka, H. Iwasawa, D. Wang, N. Toyoda, T. Aoki, I. Yudasaka, Y. Matsuki, T. Shimoda and M. Furusawa, “Spin-on n-Type Silicon Films Using Phosphorous-doped Polysilanes” Japanese Journal of Applied Physic, Vol. 46, 2007, pp. L886-L888. doi:10.1143/JJAP.46.L886

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