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M. Dai, K. Chen, X. F. Huang, L. C. Wu and K. J. Chen, “Formation and charging effect of Si nanocrystals in a-SiNx/a-Si/a-SiNx structures,” J. Appl. Phys., Vol. 95, 2004, pp. 640-645. doi:10.1063/1.1633649

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