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T. E. Belly, P. T. J. Gennissenz, D. DeMunterz and M. Kuhl, “Porous Silicon as a Sacrificial Material,” Journal Micromechanical Microengineering, Vol. 6, No. 4, 1996, pp. 361-369. doi:10.1088/0960-1317/6/4/002

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