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S.-H. Lee, K. H. Yoon, D.-S. Cheong and J.-K. Lee, “Relationship between Re-sidual Stress and Structural Properties of AlN Films Deposited by r.f. Reacrive Sputtering,” Thin Solid Films, Vol. 435, No. 1-2, 2003, pp. 193-198. doi:10.1016/S0040-6090(03)00353-5

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