TITLE:
XPS Depth Profile Study of Sprayed Ga2O3 Thin Films
AUTHORS:
Towhid Adnan Chowdhury
KEYWORDS:
Ga2O3, Thin Films, x-Ray Photoelectron Spectroscopy, Depth Profiling
JOURNAL NAME:
Engineering,
Vol.15 No.8,
August
4,
2023
ABSTRACT: Ga2O3 thin films were fabricated by spray pyrolysis
method using gallium acetylacetonate as source material and water as oxidizer.
The films were annealed at 450°C for 60 minutes in argon atmosphere. X-ray
photoelectron spectroscopy (XPS) depth profile studies were carried out to
analyze the stoichiometry and composition of sprayed as-deposited and annealed
Ga2O3 thin films. Surface layers and the inner layers of
as-deposited and annealed films were found nearly stoichiometric.