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Naghavi, N. Henriquez, R. Laptev, V. and Lincot, D. (2004) Growth Studies and Characterization of In2S3 Thin Films Deposited by Atomic Layer Deposition (ALD). Applied Surface Science, 222, 65-73.
https://doi.org/10.1016/j.apsusc.2003.08.011

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