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K. Luo, Y. Q. Fu, H. R. Le, J. A. Williams, S. M. Spear-ing and W. I. Milne “Diamonde and Diamonde-Like Carbon MEMS,” Journal of Micromechanics and Mi-croengineering, Vol. 17, No. 1, June 2007, pp. S147-S163. doi:10.1088/0960-1317/17/7/S12

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