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H. Kinoshita, R. Ikuta and T. Yamaguchi, “Sputter-Assisted Plasma CVD of Wide or Narrow Optical Bandgap Amorphous CNx:H films Using i-C4H10/N2 Supermagnetron Plasma,” Thin Solid Films, Vol. 516, No. 13, 2008, pp. 4441-4445. doi:10.1016/j.tsf.2007.10.017

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