Power and Energy Engineering Conference (PEEC 2010 E-BOOK)

Wuhan,China,9.11-9.13,2010

ISBN: 978-1-935068-17-4 Scientific Research Publishing, USA

E-Book 846pp Pub. Date: October 2010

Category: Engineering

Price: $80

Title: A Study on Friction and Wear Properties of a-Si:H-DLC Film
Source: Power and Energy Engineering Conference (PEEC 2010 E-BOOK) (pp 395-399)
Author(s): Jinhua Zheng, Departments of Thermal Energy & Power Engineering, School of Chemical Engineering and Energy, Zhengzhou University, Zhengzhou City, China
Chunlei Lin, Departments of Chemistry, Graduate School of Science, Hiroshima University, Higashi-hiroshima City, Japan
Ying Chen, Departments of Chemistry, Graduate School of Science, Hiroshima University, Higashi-hiroshima City, Japan
Xinli Wei, Departments of Thermal Energy & Power Engineering, School of Chemical Engineering and Energy, Zhengzhou University, Zhengzhou City, China
Abstract: In this study a method to deposit DLC film at room temperature had been explored by CVD. In order to improve the interface strength between substrate and DLC film, the deposition process of a-Si:H intermediate material was researched. The interface strength and the friction properties of a-Si:H-DLC film deposited on the metal substrates were evaluated.
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