Journal of Materials Science and Chemical Engineering

Journal of Materials Science and Chemical Engineering

ISSN Print: 2327-6045
ISSN Online: 2327-6053
www.scirp.org/journal/msce
E-mail: msce@scirp.org
"TEM Observation of Si0.99C0.01 Thin Films with Arsenic-Ion-, Boron-Ion-, and Silicon-Ion-Implantation Followed by Rapid Thermal Annealing"
written by Junji Yamanaka, Shigenori Inoue, Keisuke Arimoto, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Atsushi Moriya, Yasuhiro Inokuchi, Yasuo Kunii,
published by Journal of Materials Science and Chemical Engineering, Vol.5 No.1, 2017
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