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P. Gonzalez, B. Guo, M. Rakowski, K. D. Meyer and A. Witvrouw, “CMOS Compatible Polycrystalline SiliconGermanium Based Pressure Sensors,” Sensors and Actuators A: Physical, Vol. 188, 2012, pp. 9-18.
doi:10.1016/j.sna.2011.12.018
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