K. Furutani, M. Urushibata, and N. Mohri, “Displacement Control of Piezoelectric Element by Feedback of Induced Charge,” Nanotechnology, Vol. 9, 1998, pp. 93-98. doi:10.1088/0957-4484/9/2/009

has been cited by the following article:

• TITLE: Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages

  AUTHORS: Lih-Chang Lin, Bor-Yih Chang, Biing-Der Liaw

  KEYWORDS: Micro/Nano Stage; Adaptive Fuzzy Control; Hysteresis Observer; Fuzzy Function Approximator

  JOURNAL NAME: Intelligent Control and Automation, Vol.3 No.4, November 28, 2012

  ABSTRACT: This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.