Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages

Lih-Chang Lin^*, Bor-Yih Chang, Biing-Der Liaw

Department of Mechanical Engineering, National Chung Hsing University, Taichung.

DOI: 10.4236/ica.2012.34043                

Abstract

This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.

Keywords

Micro/Nano Stage; Adaptive Fuzzy Control; Hysteresis Observer; Fuzzy Function Approximator

Conflicts of Interest

The authors declare no conflicts of interest.

References

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