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Alam, A.U., Howlader, M.M.R. and Deen, M.J. (2014) The Effects of Oxygen Plasma and Humidity on Surface Roughness, Water Contact Angle and Hardness of Silicon, Silicon Dioxide and Glass. Journal of Micromechanics and Microengineering, 24, Article ID: 035010.
https://doi.org/10.1088/0960-1317/24/3/035010

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