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Tanaka, H., Iwasawa, H., Wang, D., Toyoda, N., Aoki, T., Yudasaka, I., Matsuki, Y., Shimoda, T. and Furusawa, M. (2007) Spin-on N-Type Silicon Films Using Phosphorous-Doped Polysilanes. Japanese Journal of Applied Physics, 46, L886-L888.
https://doi.org/10.1143/JJAP.46.L886

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