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Opto-Structural Properties of Silicon Nitride Thin Films Deposited by ECR-PECVD
(Articles)
Hicham Charifi
,
Abdelilah Slaoui
,
Jean Paul Stoquert
,
Hassan Chaib
,
Abdelkrim Hannour
World Journal of Condensed Matter Physics
Vol.6 No.1
,December 30, 2015
DOI:
10.4236/wjcmp.2016.61002
5,148
Downloads
6,933
Views
Citations
IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma-Enhanced Chemical Vapor Deposition
(Articles)
Shin-ichi Kobayashi
World Journal of Condensed Matter Physics
Vol.6 No.4
,November 2, 2016
DOI:
10.4236/wjcmp.2016.64027
3,247
Downloads
5,123
Views
Citations
Low Temperature Formation of Silver and Silver-Copper Alloy Nano-Particles Using Plasma Enhanced Hydrogenation and Their Optical Properties
(Articles)
Zeinab Kiani
,
Yaser Abdi
,
Ezatollah Arzi
World Journal of Nano Science and Engineering
Vol.2 No.3
,September 28, 2012
DOI:
10.4236/wjnse.2012.23018
5,575
Downloads
9,186
Views
Citations
Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study
(Articles)
Haman Hedaiatmofidi
,
Alireza Sabour Rouh Aghdam
,
Shahrokh Ahangarani
,
Mansour Bozorg
,
Mahboube Azadi
,
Maryam Valiei
Materials Sciences and Applications
Vol.5 No.3
,March 17, 2014
DOI:
10.4236/msa.2014.53018
4,296
Downloads
6,462
Views
Citations
This article belongs to the Special Issue on
Research on Coatings
Low Temperature Growth of Hydrogenated Silicon Prepared by PECVD from Argon Diluted Silane Plasma
(Articles)
Rachid Amrani
,
Pascale Abboud
,
Larbi Chahed
,
Yvan Cuminal
Crystal Structure Theory and Applications
Vol.1 No.3
,December 31, 2012
DOI:
10.4236/csta.2012.13012
5,496
Downloads
9,777
Views
Citations
Elaboration and Magnetic Properties of Cobalt-Palladium Magnetic Nanowires Encapsulated in Carbon Nanotubes
(Articles)
Olivier Rousseau
,
Cynthia Locard
,
Aïchata Kane
,
Yves Roussigné
,
Samir Farhat
,
Salim Mourad Chérif
J. of Surface Engineered Materials and Advanced Technology
Vol.7 No.1
,December 22, 2016
DOI:
10.4236/jsemat.2017.71001
1,845
Downloads
3,070
Views
Citations
Creation and Evaluation of Construction Guidelines Using CFD for Low Pressure Plasma Gas Feed-in Systems to Homogenize the Precursor Gas Flow
(Articles)
Gustavo Simiema de Freitas Barbosa
,
Klaus Vissing
,
Bernd Mayer
Open Journal of Fluid Dynamics
Vol.6 No.4
,December 26, 2016
DOI:
10.4236/ojfd.2016.64029
1,650
Downloads
2,862
Views
Citations
The Effect of Tin on PECVD-Deposited Germanium Sulfide Thin Films for Resistive RAM Devices
(Articles)
Rene Rodriguez
,
Benjamin Poulter
,
Mateo Gonzalez
,
Fadil Ali
,
Lisa D. Lau
,
McKenzie Mangun
Materials Sciences and Applications
Vol.8 No.2
,February 7, 2017
DOI:
10.4236/msa.2017.82012
1,828
Downloads
3,028
Views
Citations
Thin Film Encapsulation at Low Temperature Using Combination of Inorganic Dyad Layers and Spray Coated Organic Layer
(Articles)
Sandeep Kumar
,
Monica Katiyar
Journal of Encapsulation and Adsorption Sciences
Vol.7 No.4
,December 5, 2017
DOI:
10.4236/jeas.2017.74011
1,304
Downloads
2,963
Views
Citations
Introduction of a New Baffle-Plate Concept to Control the Gas Flow Behavior in a Large Volume PECVD Chamber
(Articles)
Gustavo Simiema de Freitas Barbosa
,
Klaus Vissing
,
Bernd Mayer
Open Journal of Fluid Dynamics
Vol.8 No.2
,June 11, 2018
DOI:
10.4236/ojfd.2018.82011
1,256
Downloads
3,459
Views
Citations
This article belongs to the Special Issue on
Fluid Modeling and Its Applications
A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition
(Articles)
Ilaria Biganzoli
,
Francesco Fumagalli
,
Fabio Di Fonzo
,
Ruggero Barni
,
Claudia Riccardi
Journal of Modern Physics
Vol.3 No.10A
,October 31, 2012
DOI:
10.4236/jmp.2012.330200
5,026
Downloads
8,105
Views
Citations
This article belongs to the Special Issue on
Fusion and Plasma Physics
Amorphous-Nanocrystalline Transition in Silicon Thin Films Obtained by Argon Diluted Silane PECVD
(Articles)
Rachid Amrani
,
Frederic Pichot
,
Larbi Chahed
,
Yvan Cuminal
Crystal Structure Theory and Applications
Vol.1 No.3
,December 31, 2012
DOI:
10.4236/csta.2012.13011
4,799
Downloads
8,952
Views
Citations
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