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E. Maruyama, S. Okamoto, A. Terakawa, W. Shinohara, M. Tanaka and S. Kiyama, “Towards Stabilized 10% Efficiency of Large-Area (>5000 cm2) a-Si/a-SiGe Tandem Solar Cells Using High-Rate Deposition,” Solar Energy Materials and Solar Cells, Vol. 71, No. 1-4, 2002, pp. 339- 349. doi:10.1016/S0927-0248(02)00093-4

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