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Tode, M., Takigawa, Y., Iguchi, T., Matsuura, H., Ohmukai, M. and Sasaki, W. (2007) Removal of Carbon Contamination on Si Wafers with an Excimer Lamp. Metallurgical and Materials Transactions A, 38, 596-598.
https://doi.org/10.1007/s11661-007-9104-y

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