Moulder, J.F., Stickle, W.F., Sobol, P.E. and Bomben, K.D. (1992) Handbook of X-Ray Photoelectron Spectroscopy. Perkin-Elmer Corporation, Eden Prairie.%
has been cited by the following article:
TITLE: XPS Depth Profile Study of Sprayed Ga2O3 Thin Films
AUTHORS: Towhid Adnan Chowdhury
KEYWORDS: Ga2O3, Thin Films, x-Ray Photoelectron Spectroscopy, Depth Profiling
JOURNAL NAME: Engineering, Vol.15 No.8, August 4, 2023
ABSTRACT: Ga2O3 thin films were fabricated by spray pyrolysis method using gallium acetylacetonate as source material and water as oxidizer. The films were annealed at 450°C for 60 minutes in argon atmosphere. X-ray photoelectron spectroscopy (XPS) depth profile studies were carried out to analyze the stoichiometry and composition of sprayed as-deposited and annealed Ga2O3 thin films. Surface layers and the inner layers of as-deposited and annealed films were found nearly stoichiometric.