Dargahi, J., Parameswaran, M. and Payandeh, S. (2000) A Micromachined Piezoelectric Tactile Sensor for an Endoscopic Grasper—Theory, Fabrication and Experiments. Journal of Microelectromechanical Systems, 9, 329-335.
http://dx.doi.org/10.1109/84.870059

has been cited by the following article:

• TITLE: A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor

  AUTHORS: Masato Ohmukai, Yasushi Kami

  KEYWORDS: Conducting Rubber, Force Sensor, Electrode, Magnetron Sputtering, Reproducibility

  JOURNAL NAME: Journal of Sensor Technology, Vol.6 No.3, August 19, 2016

  ABSTRACT: Compressive force sensors or pressure sensors are indispensable to tactile sensors in humanoid robots. It is investigated that low-cost electro-conducting rubber sheets are applied to the force sensor, of which the biggest problem is its poor reproducibility. It was found that the aluminum deposition by a vacuum evaporation method shows excellent characteristics but suffers deterioration by a radiation heating effect. The aluminum electrode was deposited by a sputtering method, known to have an advantage of a low-temperature method, and the reproducibility of the output was improved.