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Ong, S.Y., Chor, E.F., Leung, Y.K., Lee, J., Li, W.S., See, A. and Chan, L. (2002) Steep Retrograde Indium Channel Profiling for High Performance nMOSFETs Device Fabrication. Microelectronics Journal, 33, 55-60.
http://dx.doi.org/10.1016/S0026-2692(01)00104-5

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