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B. Saha, E. Liu, S. B. Tor, N. W. Khun, D. E. Hardt and J. H. Chun, “Replication Performance of Si-N-DLC-Coated Si Micro-Molds in Micro-Hot-Embossing,” Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, pp. 1-8.

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