Article citationsMore>>

B. Saha, E. Liu, S. B. Tor, N. W. Khun, D. E. Hardt and J. H. Chun, “Replication Performance of Si-N-DLC-Coated Si Micro-Molds in Micro-Hot-Embossing,” Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, pp. 1-8.
http://dx.doi.org/10.1088/0960-1317/20/4/045007

has been cited by the following article:

Contact us
Follow SCIRP
Twitter Facebook Linkedin Weibo
Free SCIRP Newsletters
Copyright © 2006-2021 Scientific Research Publishing Inc. All Rights Reserved.
Top