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W. J. Yang, T. Sekino, K. B. Shim, K. Niihara and K. H. Auh, “Microstructure and Tribological Properties of SiOx/DLC Films Grown by PECVD,” Surface and Coatings Technology, Vol. 194, No. 1, 2005, pp. 128-135.
http://dx.doi.org/10.1016/j.surfcoat.2004.05.023

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