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M. Günther, I. Bialuch, S. Peter, K. Bewilogua and F. Richter, “High Rate Deposition of Hard a-C:H Films Using Microwave Excited Plasma Enhanced CVD,” Surface and Coatings Technology, Vol. 205, No. S2, 2011, pp. S94-S98. http://dx.doi.org/10.1016/j.surfcoat.2010.12.047

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