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S. Xu, B. K. Tay, H. S. Tan, L. Zhong, Y. Q. Tu, S. R. R. Silva and W. I. Milne, “Properties of Carbon Ion Deposited Tetrahedral Amorphous Carbon Films as a Function of Ion Energy,” Journal of Applied Physics, Vol. 79, No. 9, 1996, pp. 7234-7240. doi:10.1063/1.361440

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