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M. Yanagisawa, Y. Tsuji, H. Yoshinaga, N. Kono and K. Hiratsuka, “Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-Shifted Diffraction Gratings of Distributed Feedback Laser Diodes,” Journal of Vacuum Science & Technology, Vol. 27, No. 6, 2009, pp. 2776-2780. doi:10.1116/1.3244631

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