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D. V. Shtansky, E. A. Levashov, A. N. Sheveiko and J. J. Moore, “Synthesis and Characterization of Ti-Si-C-N Films,” Metallurgical and Materials Transaction A, Vol. 30, No. 9, 1999, pp. 2439-2447. doi:10.1007/s11661-999-0252-0

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