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N. Matsunami, T. Shimura, M. Tazawa, T. Kusumori, H. Kakiuchida, M. Ikeyama, Y. Chimi and M. Sataka, “Modifications of AlN Thin Films by Ions,” Nuclear Instruments Methods B, Vol. 257, No. 1-2, 2007, pp. 433-437. doi:10.1016/j.nimb.2007.01.043

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