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J. Keckes, S. Six, W. Tesch, R. Resel and B. Rauschenbach, “Evaluation of Thermal and Growth Stresses in Heteroepitaxial AlN Thin Films Formed on (0001) Sapphire by Pulsed Laser Ablation,” Journal of Crystal Growth, Vol. 240, No. 1-2, 2002, pp. 80-86. doi:10.1016/S0022-0248(02)00877-1

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