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J. Olivares, E. Iborra, M. Clement, L. Vergara, J. Sangrador and A. Sanz-Hervas, “Piezoelectric Actuation of Microbridges Using AlN,” Sensors and Actuators A, Vol. 123-124, 2005, pp. 590-595. doi:10.1016/j.sna.2005.03.066

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