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A. F. Belyanin, L. L. Bouilov, V. V. Zhirnov, A. I. Kame- nev, K. A. Kovalskij and B. V. Spitsyn, “Applications of Aluminum Nitride Films for Electronic Devices,” Diamond and Related Materials, Vol. 8, No. 2-5, 1999, pp. 369-372. doi:10.1016/S0925-9635(98)00412-9

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