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C. Ozgit, I. Donmez, M. Alevli and N. Biyikli, “Self-Limiting Low-Temperature Growth of Crystalline AlN Thin Films by Plasma-Enhanced Atomic Layer Deposition,” Thin Solid Films, Vol. 520, 2012, pp. 2750-2755. doi:10.1016/j.tsf.2011.11.081

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