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M. A. Wank, R. A. C. M. M. Van Swaaij, P. Kudlacek, M. C. M. Van de Sanden and M. Zeman, “Hydrogenated Amorphous Silicon Deposited under Accurately Controlled Ion Bombardment Using Pulse-Shaped Substrate Biasing,” Journal of Applied Physics, Vol. 108, No. 10, 2010, Article ID: 103304. doi:10.1063/1.3505794

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