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S. N. Tkachev, M. H. Manghnani, A. Niilisk, J. Aarik, and H. Mandar, “Raman and Brillouin Scattering Spectroscopy Studies of Atomic Layer-Deposited ZrO2 and HfO2 Thin Films,” Spectrochimica Acta Part A, Vol. 61, No. 10, 2005, pp. 2434-2438. doi:10.1016/j.saa.2005.02.025

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