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P. Merel, M. Tabbal, M. Chaker, M. Moisan and A. Ricard, “Influence of the Field Frequency on the Nitrogen Atom Yield in the Remote Plasma of an N2 High Frequency Discharge,” Plasma Sources Science and Technology, Vol. 7, No. 4, 1998, p. 550. doi:10.1088/0963-0252/7/4/012

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