H.-J. Shieh, Y.-J. Chiu and Y.-T. Chen, “Optimal PID Control System of a Piezoelectric Microospitioner,” 2008 IEEE/SICE International Symposium on System Integration, Nagoya, 4 December 2008, pp. 1-5. doi:10.1109/SI.2008.4770417

has been cited by the following article:

• TITLE: A Survey of Modeling and Control of Piezoelectric Actuators

  AUTHORS: Jingyang Peng, Xiongbiao Chen

  KEYWORDS: Piezoelectric Actuators; Modeling; Control

  JOURNAL NAME: Modern Mechanical Engineering, Vol.3 No.1, February 27, 2013

  ABSTRACT: Piezoelectric actuators (PEAs) have been widely used in micro- and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.