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Y. Kokubun, Y. Hatakeyama, M. Ogata, S. Suzuki and N. Zaizen, “Fabrication Technologies for Vertically Coupled Micro Ring Resonator with Multilevel Crossing Busline and Ultracompact-Ring Radius,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 11, No. 1, 2005, pp. 4-10.

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