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M. Munekata, S. Kimura, H. Kurishima, J. Tanaka, H., Yoshikawa, and H. Ohba, “Effect of the Catch Cup Geometry on the 3D Boundary Layer Flow over the Wafer Surface in a Spin Coating,” Journal of Thermal Science, Vol. 17, No. 1, 2008, pp. 56-60. doi:10.1007/s11630-008-0056-3

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