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P. I. Oden, G. Y. Chen, R. A. Steele, R. J. Warmack and T. Thundat, “Viscous Drag Measurements Utilizing Microfabricated Cantilevers,” Applied Physics Letters, Vol. 68, No. 26, 1996, pp. 3814-3817. doi:10.1063/1.116626

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