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L. J. Ward, W. C. E. Schofield, J. P. S. Badyal, A. J. Goodwin and P. J. Merlin, “Atmospheric Pressure Glow Discharge Deposition of Polysiloxane and SiOx Film,” Langmuir, Vol. 19, No. 6, 2003, pp. 2110-2114. doi:10.1021/la0204287

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