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L. Zajickova, J. Janca, and V. Perina, “Characterization of Silicon Oxide Thin Films Deposited by Plasma Enhanced Chemical Vapour Deposition from Octamethylcyclotetrasiloxane/Oxygen Feeds,” Thin Solid Films, Vol. 338, No. 1-2, 1999, pp. 45-59. doi:10.1016/S0040-6090(98)00976-6

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