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C. Biloiu, I. A. Biloiu, Y. Sakai, Y. Suda and A. Ohta, “Amorphous Fluorocarbon Polymer (a-C: F) Films Obtained by Plasma Enhanced Chemical Vapor Deposition from Perfluoro-Octane (C8F18) Vapor I: Deposition, Morphology, Structural and Chemical Properties,” Journal of Vacuum Science & Technology A, Vol. 22, No. 4, 2004, pp. 1158-1165. doi:10.1116/1.1759354

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