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has been cited by the following article:

• TITLE: Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit

  AUTHORS: Akane Iizuka, Minami Takato, Masato Kaneko, Tatsuya Nishi, Ken Saito, Fumio Uchikoba

  KEYWORDS: MEMS; Air Turbine; Generator; Multilayer Ceramic; Ferrite; Dr. Blade; Screen Print

  JOURNAL NAME: Modern Mechanical Engineering, Vol.2 No.2, May 15, 2012

  ABSTRACT: This paper provides a new system and concept concerning to MEMS air turbine power generator. The generator was composed of the MEMS air turbine and the magnetic circuit. The magnetic circuit was fabricated by multilayer magnetic ceramic technology and achieved monolithic structure which included high permeability material and three di-mensional helical conductor patterns inside. Although the output power was micro watt class, some features were extracted by comparing to the simple winding wire type magnetic circuit. In the power density measurement, almost same output power density was extracted though the turn number of the winding wire type was more than that of monolithic type. Also the resistance of the conductor was quarter of the winding type. The maximum output voltage and the maximum power of the monolithic generator was 6.2 mV and 1.92 μVA respectively. The DC conductor resistance was 1.2 Ω. The energy density was 0.046 μVA/mm3. The appearance size of the monolithic type was 3.6, 3.4, 3.5 mm, length, width and height respectively.