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B. Ziaie, A. Baldi, M. Lei, Y. Gu and R. A. Siegel, “Hard and Soft Micromachining for BioMEMS: Review of Techniques and Examples of Applications in Microfluidics and Drug Delivery,” Advanced Drug Delivery Reviews, Vol. 56, No. 2, 2004, pp. 145-172. doi:10.1016/jaddr.2003.09.001

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