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P. Frach, K. Goedicke, C. Gottfried and H. Bartzsch, “A Versatile Coating Tool for Reactive In-Line Sputtering in Different Pulse Modes”, Surface and Coatings Technology, Vol. 142-144, 2001, pp. 628-634. doi:10.1016/S0257-8972(01)01152-5

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