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A. A. Kuijpers, G. J. M. Krijnen, R. J. Wiegerink, T. S. J. Lammerink and M. Elwenspoek, “A Micromachined Capacitive Incremental Position Sensor: Part 2. Experimental Assessment,” Journal of Micromechanics and Microengineering, Vol. 16, No. 6, 2006, pp. S125-S134. doi:10.1088/0960-1317/16/6/S19

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