Milanovi, V., McCormick, D.T. and Matus, G. (2004) Gimbal Less Monolithic Silicon Actuators for Tip-Tilt Piston Micromirror Applications. IEEE J. Sel. Top. Quantum Electron., 10, 462-471. https://doi.org/10.1109/JSTQE.2004.829205

has been cited by the following article:

• TITLE: A Compact MEMS-Based Optical Scanning System with Large Field of View for Lidars

  AUTHORS: Yongjie Wang, Ligong Chen

  KEYWORDS: MEMS Mirror, Lidar Scanning System, Beam Steering, Optical Design

  JOURNAL NAME: Optics and Photonics Journal, Vol.11 No.8, August 3, 2021

  ABSTRACT: In this work, a design of a compact optical MEMS-based lidar scanning system with a large field of view (FOV) and small distortion is presented. The scanning system applies an off-axis structure and the length of the system can be reduced to about 10 cm in an optimized way. Simulation results show that a large FOV is achieved under a uniform scanning scheme. In addition, the spot size less than 20 cm at distance of 100 m is also realized. The optical scanning system can be used for the vehicle-mounted Lidar.