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D. Croft, G. Shed and S. Devasia, “Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application,” Journal of Dynamic Sys- tems, Measurement, and Control, Vol. 123, No. 1, 2001, pp. 35-43. doi:10.1115/1.1341197

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