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Tada, M., Park, J.H., Jain, J.R. and Saraswat, K.C. (2009) Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon-Germanium Films. Journal of the Electrochemical Society, 156, D23-D27.
https://doi.org/10.1149/1.3008009

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