TITLE:
Design and Optimization of Comb Drive Accelerator for High Frequency Oscillation
AUTHORS:
Zichen Zhang
KEYWORDS:
Comb-Drive Micro-Structure, COMSOL Multiphysics, Optimization, Electric Responses
JOURNAL NAME:
Modern Mechanical Engineering,
Vol.8 No.1,
January
17,
2018
ABSTRACT: Comb-drive devises
have been widely applied in many fields. However, the application of high
frequency sensor, such as rocket chamber, still remains problems. In this work,
a finite element code was used for the design, optimization and visualization
of a comb drive accelerator. In the simulation results, the post-optimization
design has high performance in high frequency oscillation operating
environment. The optimization is based on the ideal eigenfrequency and
Nelder-Mead method. The 3-D working conditions are realized by testing and
comparing the time and frequency domain of pre-optimized and optimized design
whose frequency ranges from 2000 Hz to 5000 Hz. Finally, the electric
potential and capacitance in comb drive are visualized, which shows the better electric signals and displacements.